User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation

doi:10.1364/oe.27.031956

CIOMP OpenIR

	User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation
	Y.Zhang; J.Luo; Z.Xiong; H.Liu; L.Wang; Y.Y.Gu; Z.F.Lu
	2019
发表期刊	Optics Express
ISSN	1094-4087
卷号	27 期号:22 页码:31956-31966
摘要	A flexible and efficient strategy, digital micromirror devices (DMD) based multistep lithography (DMSL), is proposed to fabricate arrays of user-defined microstructures. Through the combination of dose modulation, flexible pattern generation of DMD, and high-resolution step movement of piezoelectrical stage (PZS), this method enables prototyping a board range of 2D lattices with periodic/nonperiodic spatial distribution and arbitrary shapes and the critical feature size is down to 600 nm. We further explore the use of DMSL to fabricate microlens array by combining with the thermal reflowing process. The square shape and hexagonal shape microlens with customized distribution are realized and characterized. The results indicate that the proposed DMSL can be a significant role in the microfabrication techniques for manufacturing functional microstructures array. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
关键词	microlens array,technology,Optics
DOI	10.1364/oe.27.031956
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62776
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Zhang,J.Luo,Z.Xiong,et al. User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation[J]. Optics Express,2019,27(22):31956-31966.
APA	Y.Zhang.,J.Luo.,Z.Xiong.,H.Liu.,L.Wang.,...&Z.F.Lu.(2019).User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation.Optics Express,27(22),31956-31966.
MLA	Y.Zhang,et al."User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation".Optics Express 27.22(2019):31956-31966.

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