Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization

doi:10.1364/ao.58.004052

CIOMP OpenIR

	Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization
	C.L.Zhu; Q.B.Jiao; X.Tan; W.Wang; Bayanheshig
	2019
发表期刊	Applied Optics
ISSN	1559-128X
卷号	58 期号:15 页码:4052-4058
摘要	A subwavelength metal grating for generating azimuthally polarized beams was designed. The grating material was determined by calculating the total thermal conductivity coefficient. A modified particle swarm optimization (PSO), which has a two-step algorithm structure, and a particle position-determined inertia weight was performed to establish the grating's structural parameters. Results show that an Au-Ti-Cu all-metal structure provides good thermal conductivity. A high duty cycle structure gives the grating high polarization selectivity of approximately 82.63% at 10.6 mu m and a minimum of 26.39% in the 9.6-11.6 mu m band. The modified PSO is more efficient and requires fewer calculations while maintaining accuracy. The geometrical parameter tolerances were also analyzed. The groove depth fabrication tolerance is 200 nm, and the sidewall angle fabrication tolerance is 19 degrees, which means that the optimized structure is insensitive to structural parameter deviations. (C) 2019 Optical Society of America
关键词	Optics
DOI	10.1364/ao.58.004052
收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/62723
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C.L.Zhu,Q.B.Jiao,X.Tan,et al. Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization[J]. Applied Optics,2019,58(15):4052-4058.
APA	C.L.Zhu,Q.B.Jiao,X.Tan,W.Wang,&Bayanheshig.(2019).Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization.Applied Optics,58(15),4052-4058.
MLA	C.L.Zhu,et al."Design of a subwavelength all-metal grating for generating azimuthally polarized beams based on modified particle swarm optimization".Applied Optics 58.15(2019):4052-4058.

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