The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD

doi:10.1039/c8tc00755a

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	The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD
	Chen, Y. R.; Zhang, Z. W.; Jiang, H.; Li, Z. M.; Miao, G. Q.; Song, H.
	2018
发表期刊	Journal of Materials Chemistry C
ISSN	2050-7526
卷号	6 期号:18 页码:4936-4942
摘要	In this paper, AlN templates with different mesothermal AlN (MT-AlN) interlayer deposition cycles are prepared via metal-organic chemical vapor deposition (MOCVD) at first. The influence of the MT-AlN interlayer on the crystalline quality of AlN templates has been carefully investigated. The results show that the MT-AlN interlayer played the role of providing a strain gradient to release the strain from AlN along the growth direction. The crystalline quality, surface morphology and residual compressive stress of AlN templates can be greatly optimized through introducing one MT-AlN interlayer cycle during the growth of HT-AlN. And then, a PIN structure back-illuminated AlGaN-based solar-blind ultraviolet photodetector (SUV-PD) is further designed, grown and fabricated based on the optimized AlN template. The SUV-PD exhibits a low dark current density, a bandpass spectral responsivity with a peak value of 0.15 A W-1 at 271 nm, corresponding to an EQE as high as 68.8%, and a response speed of 6.5 ns. These results strongly reflect the high quality of AlN templates prepared via inserting a MT-AlN interlayer based on a common growth method.
关键词	threading dislocations nucleation layer gan temperature sapphire Materials Science Physics
DOI	10.1039/c8tc00755a
收录类别	SCI ; EI
引用统计	被引频次：65[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61185
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Chen, Y. R.,Zhang, Z. W.,Jiang, H.,et al. The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD[J]. Journal of Materials Chemistry C,2018,6(18):4936-4942.
APA	Chen, Y. R.,Zhang, Z. W.,Jiang, H.,Li, Z. M.,Miao, G. Q.,&Song, H..(2018).The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD.Journal of Materials Chemistry C,6(18),4936-4942.
MLA	Chen, Y. R.,et al."The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD".Journal of Materials Chemistry C 6.18(2018):4936-4942.

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