The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution

doi:10.1016/j.ultsonch.2017.09.011

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	The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution
	Jiao, Q. B.; Zhu, C. L.; Tan, X.; Qi, X. D.; Bayanheshig
	2018
发表期刊	Ultrasonics Sonochemistry
ISSN	1350-4177
卷号	40 页码:937-943
摘要	In the silicon echelle grating fabrication process, the "pseudo-mask" formed by the hydrogen bubbles generated during the etching process is the reason causing high surface roughness and poor surface quality of blazed plane. Based upon the ultrasonic mechanical effect and contact angle reduced by surfactant additive, ultrasonic vibration, isopropyl alcohol (IPA) and 2,4,7,9-Tetramethyl-5-decyne-4,7-diol (TMDD) were used to improve surface quality of 53.5 gr/mm echelle grating. The surface roughness R-q is smaller than 18 nm, 7 nm and 2 nm when using ultrasonic vibration, IPA and TMDD respectively. The surface roughness Rq is smaller than 5 nm and 1.5 nm respectively when combining ultrasonic vibration with IPA and TMDD. The experimental results indicated that the combination of ultrasonic agitation and surfactant additive (IPA & TMDD) could obtain a lower surface roughness of blazed plane in silicon echelle grating fabrication process.
关键词	Surface roughness Silicon echelle grating Ultrasonic agitation Surfactant additive extreme-ultraviolet si agitation alcohol Acoustics Chemistry
DOI	10.1016/j.ultsonch.2017.09.011
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61180
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Jiao, Q. B.,Zhu, C. L.,Tan, X.,et al. The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution[J]. Ultrasonics Sonochemistry,2018,40:937-943.
APA	Jiao, Q. B.,Zhu, C. L.,Tan, X.,Qi, X. D.,&Bayanheshig.(2018).The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution.Ultrasonics Sonochemistry,40,937-943.
MLA	Jiao, Q. B.,et al."The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution".Ultrasonics Sonochemistry 40(2018):937-943.

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