Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm

doi:10.1016/j.optcom.2017.11.045

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	Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm
	Kuang, S. Q.; Gong, X. P.; Yang, H. G.
	2018
发表期刊	Optics Communications
ISSN	0030-4018
卷号	410 页码:805-810
摘要	Considering the random fluctuations of the layer thickness, a method of robust design of broadband EUV multilayers based on multi-objective evolutionary algorithm is presented. Owing to the optimization of multiobjective evolutionary algorithm, the optical performance and robust quality of broadband Mo/Si multilayer can be optimized simultaneously, and then a set of robust designs of aperiodic EUV multilayers, which are insensitive to the thickness errors can be obtained in one single simulation run. The robust designs of broadband Mo/Si multilayers could be used to reduce the production risks of EUV mirrors, and this research demonstrates a great potential of application of multi-objective evolutionary algorithm on the design of optical thin film. (C) 2017 Elsevier B.V. All rights reserved.
关键词	Multilayers Multilayer design X-ray Soft X-rays Extreme ultraviolet Thin films x-ray genetic algorithm mirrors fabrication reflectivity optimization coatings Optics
DOI	10.1016/j.optcom.2017.11.045
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61140
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Kuang, S. Q.,Gong, X. P.,Yang, H. G.. Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm[J]. Optics Communications,2018,410:805-810.
APA	Kuang, S. Q.,Gong, X. P.,&Yang, H. G..(2018).Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm.Optics Communications,410,805-810.
MLA	Kuang, S. Q.,et al."Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm".Optics Communications 410(2018):805-810.

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