Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies

doi:10.1364/oe.26.015059

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	Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies
	Zhang, Y.; Tian, X. B.; Liang, R. G.
	2018
发表期刊	Optics Express
ISSN	1094-4087
卷号	26 期号:12 页码:15059-15072
摘要	To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
关键词	wave-front reconstruction testing optical-surfaces iterative algorithm extraction interferograms vibration errors steps Optics
DOI	10.1364/oe.26.015059
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61117
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Y.,Tian, X. B.,Liang, R. G.. Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies[J]. Optics Express,2018,26(12):15059-15072.
APA	Zhang, Y.,Tian, X. B.,&Liang, R. G..(2018).Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies.Optics Express,26(12),15059-15072.
MLA	Zhang, Y.,et al."Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies".Optics Express 26.12(2018):15059-15072.

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