High-accuracy measurement of the focal length and distortion of optical systems based on interferometry

doi:10.1364/ao.57.005217

CIOMP OpenIR

	High-accuracy measurement of the focal length and distortion of optical systems based on interferometry
	Yang, G. Q.; Miao, L.; Zhang, X.; Sun, C.; Qiao, Y. F.
	2018
发表期刊	Applied Optics
ISSN	1559-128X
卷号	57 期号:18 页码:5217-5223
摘要	A figure measuring interferometer (FMI) method is proposed for high-accuracy measurement of the focal length and distortion of optical systems simultaneously. FMI uses the Zernike coefficients of interference fringe to identify the image point position precisely, and then measures the distance between the image points under the different fields to determine the image height. The field of view can also be accurately obtained by a precise rotating platform. Linear fitting between the field of view and the image height is used to calculate the focal length and distortion. The experimental results indicate that FMI has a relative expanded standard uncertainty of less than 0.01% for focal length and 0.02% for distortion. In brief, the proposed method is feasible for measurement of the focal length and distortion with high accuracy, promising further industrial applications. (C) 2018 Optical Society of America
关键词	talbot interferometry Optics
DOI	10.1364/ao.57.005217
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61013
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Yang, G. Q.,Miao, L.,Zhang, X.,et al. High-accuracy measurement of the focal length and distortion of optical systems based on interferometry[J]. Applied Optics,2018,57(18):5217-5223.
APA	Yang, G. Q.,Miao, L.,Zhang, X.,Sun, C.,&Qiao, Y. F..(2018).High-accuracy measurement of the focal length and distortion of optical systems based on interferometry.Applied Optics,57(18),5217-5223.
MLA	Yang, G. Q.,et al."High-accuracy measurement of the focal length and distortion of optical systems based on interferometry".Applied Optics 57.18(2018):5217-5223.

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