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High-accuracy measurement of the focal length and distortion of optical systems based on interferometry
Yang, G. Q.; Miao, L.; Zhang, X.; Sun, C.; Qiao, Y. F.
2018
发表期刊Applied Optics
ISSN1559-128X
卷号57期号:18页码:5217-5223
摘要A figure measuring interferometer (FMI) method is proposed for high-accuracy measurement of the focal length and distortion of optical systems simultaneously. FMI uses the Zernike coefficients of interference fringe to identify the image point position precisely, and then measures the distance between the image points under the different fields to determine the image height. The field of view can also be accurately obtained by a precise rotating platform. Linear fitting between the field of view and the image height is used to calculate the focal length and distortion. The experimental results indicate that FMI has a relative expanded standard uncertainty of less than 0.01% for focal length and 0.02% for distortion. In brief, the proposed method is feasible for measurement of the focal length and distortion with high accuracy, promising further industrial applications. (C) 2018 Optical Society of America
关键词talbot interferometry Optics
DOI10.1364/ao.57.005217
收录类别SCI ; EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/61013
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
Yang, G. Q.,Miao, L.,Zhang, X.,et al. High-accuracy measurement of the focal length and distortion of optical systems based on interferometry[J]. Applied Optics,2018,57(18):5217-5223.
APA Yang, G. Q.,Miao, L.,Zhang, X.,Sun, C.,&Qiao, Y. F..(2018).High-accuracy measurement of the focal length and distortion of optical systems based on interferometry.Applied Optics,57(18),5217-5223.
MLA Yang, G. Q.,et al."High-accuracy measurement of the focal length and distortion of optical systems based on interferometry".Applied Optics 57.18(2018):5217-5223.
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