High single-fundamental-mode power VCSEL integrated with alternating aluminum content micro-lens

doi:10.1364/ao.57.007055

CIOMP OpenIR

	High single-fundamental-mode power VCSEL integrated with alternating aluminum content micro-lens
	Huang, Y. W.; Zhang, X.; Zhang, J. W.; Hofmann, W.; Ning, Y. Q.; Wang, L. J.
	2018
发表期刊	Applied Optics
ISSN	1559-128X
卷号	57 期号:24 页码:7055-7059
摘要	The patterned top-emitting vertical-cavity surface-emitting laser (VCSEL) with a fixed diameter etching window was etched in hydrobromic acid solution with anisotropic etching. An all-semiconductor micro-lens that consisted of alternating aluminum content was directly formed on the output window. The etched curved surface with designed curvature radius makes the mirror loss located at the convex region differ from the edge region. Higher-order modes experience larger mirror loss and are therefore filtered out. The VCSEL with the designed micro-lens readies a 3.14 mW single-mode power with side-mode suppression ratio >25 dB, which is over 50 times higher than the 0.06 mW single-mode power of the reference VCSEL. (C) 2018 Optical Society of America
关键词	surface-emitting lasers fabrication sensors arrays design Optics
DOI	10.1364/ao.57.007055
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61012
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Huang, Y. W.,Zhang, X.,Zhang, J. W.,et al. High single-fundamental-mode power VCSEL integrated with alternating aluminum content micro-lens[J]. Applied Optics,2018,57(24):7055-7059.
APA	Huang, Y. W.,Zhang, X.,Zhang, J. W.,Hofmann, W.,Ning, Y. Q.,&Wang, L. J..(2018).High single-fundamental-mode power VCSEL integrated with alternating aluminum content micro-lens.Applied Optics,57(24),7055-7059.
MLA	Huang, Y. W.,et al."High single-fundamental-mode power VCSEL integrated with alternating aluminum content micro-lens".Applied Optics 57.24(2018):7055-7059.

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