Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition

doi:10.1364/ao.57.000f31

CIOMP OpenIR

	Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition
	Zhang, Z. Y.; Wang, R. Q.; Hao, T.; Guo, C. L.; Xue, D. L.; Zhang, X. J.
	2018
发表期刊	Applied Optics
ISSN	1559-128X
卷号	57 期号:34 页码:F31-F36
摘要	With the development of optical systems used in astronomical and earth observation, aspherical and free-form surfaces are increasingly used because they are lightweight and have improved image quality. As a highly accurate, aberrationless technique, computer-generated hologram (CGH) plays an important role in wavefront testing. At present, the main way to fabricate phase CGH is reactive ion etching, which suffers from low accuracy. To improve the accuracy, physical vapor deposition (PVD) is applied in the fabrication of phase CGH. The wavefront errors of PVD-fabricated phase CGH were analyzed. Testing results indicate that the wavefront error of the CGH is 0.020 lambda root mean square (RMS), mainly caused by the machine tool orthogonality error rather than the PVD process. The diffraction efficiency of the +1st order is 22.4%. (C) 2018 Optical Society of America
关键词	Optics
DOI	10.1364/ao.57.000f31
收录类别	SCI ; EI
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60990
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Z. Y.,Wang, R. Q.,Hao, T.,et al. Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition[J]. Applied Optics,2018,57(34):F31-F36.
APA	Zhang, Z. Y.,Wang, R. Q.,Hao, T.,Guo, C. L.,Xue, D. L.,&Zhang, X. J..(2018).Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition.Applied Optics,57(34),F31-F36.
MLA	Zhang, Z. Y.,et al."Fabrication of a high-accuracy phase-type computer-generated hologram by physical vapor deposition".Applied Optics 57.34(2018):F31-F36.

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