Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method

doi:10.1364/oe.26.025381

CIOMP OpenIR

	Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method
	Shen, C.; Tan, X.; Jiao, Q. B.; Zhang, W.; Wu, N.; Bayan, H.; Qi, X. D.
	2018
发表期刊	Optics Express
ISSN	1094-4087
卷号	26 期号:19 页码:25381-25398
摘要	A swing ion-beam etching method to fabricate convex blazed gratings used in shortwave infrared hyperspectral imaging spectrometers is presented. This method solves the consistency problem of blaze angles by swing etching through the meridian direction of the gratings. The mathematical relationship of the curvature, aperture, and diffraction efficiency of convex gratings is studied to demonstrate the limitation of conventional translational lithography and the necessity of swing etching. A geometric model is built to analyze the influence of swinging speed and beam slit width on groove evolution. Convex gratings with a 45.5 gr/mm groove density, 67 mm aperture, 156.88 mm radius of curvature, and 2.2 degrees blaze angle have been fabricated and measured where the peak and average diffraction efficiency in the shortwave infrared band reach 90% and 70%, respectively. Experimental results validate that high-efficiency convex gratings of small blaze angle and high groove consistency can be produced by swing etching, which satisfy the requirements for high spectral resolution and miniaturization of imaging spectrometers. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
关键词	imaging spectrometer hyperspectral imager ultraviolet algorithm alignment design Optics
DOI	10.1364/oe.26.025381
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60938
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Shen, C.,Tan, X.,Jiao, Q. B.,et al. Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method[J]. Optics Express,2018,26(19):25381-25398.
APA	Shen, C..,Tan, X..,Jiao, Q. B..,Zhang, W..,Wu, N..,...&Qi, X. D..(2018).Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method.Optics Express,26(19),25381-25398.
MLA	Shen, C.,et al."Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method".Optics Express 26.19(2018):25381-25398.

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