Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry | |
Fang, C.; Xiang, Y.; Qi, K. Q.; Chen, D. W. | |
2018 | |
发表期刊 | Photonic Sensors |
ISSN | 1674-9251 |
卷号 | 8期号:3页码:255-262 |
摘要 | In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2A degrees and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy. |
关键词 | Calibration phase measurement phase shifting interferometry spatial-resolution phase optics Instruments & Instrumentation Optics |
DOI | 10.1007/s13320-018-0500-2 |
收录类别 | SCI ; EI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/60923 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | Fang, C.,Xiang, Y.,Qi, K. Q.,et al. Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry[J]. Photonic Sensors,2018,8(3):255-262. |
APA | Fang, C.,Xiang, Y.,Qi, K. Q.,&Chen, D. W..(2018).Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry.Photonic Sensors,8(3),255-262. |
MLA | Fang, C.,et al."Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry".Photonic Sensors 8.3(2018):255-262. |
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