CIOMP OpenIR
Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry
Fang, C.; Xiang, Y.; Qi, K. Q.; Chen, D. W.
2018
发表期刊Photonic Sensors
ISSN1674-9251
卷号8期号:3页码:255-262
摘要In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2A degrees and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.
关键词Calibration phase measurement phase shifting interferometry spatial-resolution phase optics Instruments & Instrumentation Optics
DOI10.1007/s13320-018-0500-2
收录类别SCI ; EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/60923
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
Fang, C.,Xiang, Y.,Qi, K. Q.,et al. Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry[J]. Photonic Sensors,2018,8(3):255-262.
APA Fang, C.,Xiang, Y.,Qi, K. Q.,&Chen, D. W..(2018).Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry.Photonic Sensors,8(3),255-262.
MLA Fang, C.,et al."Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry".Photonic Sensors 8.3(2018):255-262.
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