Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing

doi:10.1166/nnl.2018.2562

CIOMP OpenIR

	Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing
	Song, C.; Li, Z. Z.; Zhang, X.; Li, Q.; Yang, H. G.; Gao, J. S.; Xing, S.
	2018
发表期刊	Nanoscience and Nanotechnology Letters
ISSN	1941-4900
卷号	10 期号:1 页码:69-74
摘要	Large-area high-quality thick Al coating is one of the most important factor which always acts as a ruling substrate in realizing high-performance large-size echelle grating ruling process. Based on our previous work, we proposed use of precise mechanical polishing methods to further reduce surface roughness of thick Al films. Surface roughness Rq of 12 mu m-thick Al film can be effectively controlled under 25 nm by early reported multi-step deposition process. The chemical mechanical polishing method was chosen in this study to improve the surface quality of thick Al coating. Rq of Al film was significantly reduced to 5.26 nm as a consequence. The surface morphology, cross section and film hardness of the polished samples were also investigated in detail. Finally, the echelle grating was fabricated on the polishing sample and the diffraction efficiency was 50% at 632.8 nm laser and 36th order. This work has great potential for both high-quality thick Al film research and large-size echelle grating performance enhancement.
关键词	Thick Al Coatings Echelle Grating Chemical Mechanical Polishing design telescope mirrors Science & Technology - Other Topics Materials Science Physics
DOI	10.1166/nnl.2018.2562
收录类别	SCI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60799
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Song, C.,Li, Z. Z.,Zhang, X.,et al. Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing[J]. Nanoscience and Nanotechnology Letters,2018,10(1):69-74.
APA	Song, C..,Li, Z. Z..,Zhang, X..,Li, Q..,Yang, H. G..,...&Xing, S..(2018).Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing.Nanoscience and Nanotechnology Letters,10(1),69-74.
MLA	Song, C.,et al."Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing".Nanoscience and Nanotechnology Letters 10.1(2018):69-74.

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