Preparation and Spectrum Characterization of a High Quality Linear Variable Filter

doi:10.3390/coatings8090308

CIOMP OpenIR

	Preparation and Spectrum Characterization of a High Quality Linear Variable Filter
	Tang, H. L.; Gao, J. S.; Zhang, J.; Wang, X. Y.; Fu, X. H.
	2018
发表期刊	Coatings
ISSN	2079-6412
卷号	8 期号:9 页码:11
摘要	To meet the requirements for lightweight, miniaturized dispersive optical systems for space applications, linear variable filters with a high transmittance and spatial dispersion coefficient are proposed. The filters were produced with dual ion beam sputtering, where a single layer thickness variation was achieved with a deposition rate adjustment based on a linear variable correction formula. A linear variable trend matching method was used to correct the film thickness based on the reduction of the mismatch error between two materials: Ta2O5 and SiO2. The influence of the spectral and spatial measuring average effects was addressed by sampling the spot size optimization. This paper presents an all-dielectric linear variable filter that operates between 520 and 1000 nm, with an excellent linear dependence of 40 nm/mm over 12 mm. The linear variable filter possessed a 2.5% bandwidth, and its transmittance was found to be >80% at the central wavelength of the band, with a 0.1% transmittance in the cut-off region. These results indicate great potential for optical devices for space applications, and the developed process has good reproducibility and stability.
关键词	linear variable filter coatings dual ion beam sputtering film thickness correction spectrum analysis bandpass-filters optical-properties fabrication resolution coatings ta2o5 angle mask Materials Science
DOI	10.3390/coatings8090308
收录类别	SCI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60774
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Tang, H. L.,Gao, J. S.,Zhang, J.,et al. Preparation and Spectrum Characterization of a High Quality Linear Variable Filter[J]. Coatings,2018,8(9):11.
APA	Tang, H. L.,Gao, J. S.,Zhang, J.,Wang, X. Y.,&Fu, X. H..(2018).Preparation and Spectrum Characterization of a High Quality Linear Variable Filter.Coatings,8(9),11.
MLA	Tang, H. L.,et al."Preparation and Spectrum Characterization of a High Quality Linear Variable Filter".Coatings 8.9(2018):11.

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