Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning

doi:10.1117/1.Oe.57.4.044105

CIOMP OpenIR

	Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning
	Li, X. C.; Zhang, Z. Y.; Hu, H. F.; Li, Y. J.; Xiang, L.; Zhang, X. J.; Yan, J. W.
	2018
发表期刊	Optical Engineering
ISSN	0091-3286
卷号	57 期号:4 页码:11
摘要	On-machine measurements can improve the form accuracy of optical surfaces in single-point diamond turning applications; however, commercially available linear variable differential transformer sensors are inaccurate and can potentially scratch the surface. We present an on-machine measurement system based on capacitive displacement sensors for high-precision optical surfaces. In the proposed system, a positiontrigger method of measurement was developed to ensure strict correspondence between the measurement points and the measurement data with no intervening time-delay. In addition, a double-sensor measurement was proposed to reduce the electric signal noise during spindle rotation. Using the proposed system, the repeatability of 80-nm peak-to-valley (PV) and 8-nm root-mean-square (RMS) was achieved through analyzing four successive measurement results. The accuracy of 109-nm PV and 14-nm RMS was obtained by comparing with the interferometer measurement result. An aluminum spherical mirror with a diameter of 300 mm was fabricated, and the resulting measured form error after one compensation cut was decreased to 254 nm in PV and 52 nm in RMS. These results confirm that the measurements of the surface form errors were successfully used to modify the cutting tool path during the compensation cut, thereby ensuring that the diamond turning process was more deterministic. In addition, the results show that the noise level was significantly reduced with the reference sensor even under a high rotational speed. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
关键词	single-point diamond turning capacitive displacement sensor noncontact measurement high efficiency compensation Optics
DOI	10.1117/1.Oe.57.4.044105
收录类别	SCI
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60737
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Li, X. C.,Zhang, Z. Y.,Hu, H. F.,et al. Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning[J]. Optical Engineering,2018,57(4):11.
APA	Li, X. C..,Zhang, Z. Y..,Hu, H. F..,Li, Y. J..,Xiang, L..,...&Yan, J. W..(2018).Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning.Optical Engineering,57(4),11.
MLA	Li, X. C.,et al."Noncontact on-machine measurement system based on capacitive displacement sensors for single-point diamond turning".Optical Engineering 57.4(2018):11.

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