Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer

doi:10.1364/jot.85.000582

CIOMP OpenIR

	Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer
	Zhang, M.; Liang, J. Q.; Liang, Z. Z.; Lv, J. G.; Qin, Y. X.; Wang, W. B.
	2018
发表期刊	Journal of Optical Technology
ISSN	1070-9762
卷号	85 期号:9 页码:582-589
摘要	In this study, we propose a Fourier transform infrared spectrometer based on stepped mirrors, which realize static. As the core component of the spectrometer, the low-stepped mirror's structural parameters significantly affect the instrument performance. In order to successfully fabricate a low-stepped mirror with a large area and submicrometer height, we propose a method involving multiple depositions accompanied by a 50% reduction in thickness at every iteration, which can precisely control the accuracy, consistency, and uniformity of the step height. After that, we fabricate a low-stepped mirror consisting of 32 stages and with a step height of 625 run. Through theoretical calculation and simulation analysis, the influence of the step's flatness error on the recovery spectrum is obtained. By increasing the substrate thickness of the stepped mirror, we can reduce the stress of the thin film. We perform experiments using the low-stepped mirror. The low-stepped mirror was incorporated into the Fourier transform infrared spectrometer, and we performed experiments to obtain the spectrum of acetonitrile liquid. The spectrogram of the acetonitrile is obtained by processing the interferogram. (C) 2018 Optical Society of America
关键词	moving parts interferometers spectroscopy Optics
DOI	10.1364/jot.85.000582
收录类别	SCI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60661
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, M.,Liang, J. Q.,Liang, Z. Z.,et al. Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer[J]. Journal of Optical Technology,2018,85(9):582-589.
APA	Zhang, M.,Liang, J. Q.,Liang, Z. Z.,Lv, J. G.,Qin, Y. X.,&Wang, W. B..(2018).Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer.Journal of Optical Technology,85(9),582-589.
MLA	Zhang, M.,et al."Fabrication and flatness error analysis of a low-stepped mirror in a static Fourier transform infrared spectrometer".Journal of Optical Technology 85.9(2018):582-589.

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