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Effects of Ambient Air Pressure on Femtosecond Laser Induced Periodic Ripple Structure on Chromium Films
Liu, Qi; Zhang, Nan; Yang, Jian-Jun
2018
发表期刊Guangzi Xuebao/Acta Photonica Sinica
ISSN10044213
卷号47期号:7
摘要The formation of one dimensional periodic subwavelength (~250 nm) ripple structures on the surface of Si-based Cr film was investigated by irradiation of blue femtosecond laser pulses (1 kHz, 50 fs, 400 nm) under different ambient air pressures of 105 Pa (or 1atm) and 10-3 Pa. The effects of the experimental parameters such as the incident laser energy fluence, the sample scanning speed and the film thickness, on the development of the surface ripple structures were compared. The results demonstrate that the quality of the surface structures can be effectively improved either by the low air pressure of 10-3 Pa or by reducing the thickness of Cr film (100 ~25 nm), however, the uneven ablation may be appeared when the Cr film is too thin ( 25 nm). Moreover, with decreasing the laser energy fluence or increasing the scanning speed, the spatial period of the ripple structures tends to become smaller, accompanied by the nanowires growth inside the grooves of the ripple structures. 2018, Science Press. All right reserved.
关键词Periodic structures Atmospheric pressure Chromium Femtosecond lasers Laser pulses Thin films Ultrafast lasers
DOI10.3788/gzxb20184707.0714001
收录类别EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/60645
专题中国科学院长春光学精密机械与物理研究所
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Liu, Qi,Zhang, Nan,Yang, Jian-Jun. Effects of Ambient Air Pressure on Femtosecond Laser Induced Periodic Ripple Structure on Chromium Films[J]. Guangzi Xuebao/Acta Photonica Sinica,2018,47(7).
APA Liu, Qi,Zhang, Nan,&Yang, Jian-Jun.(2018).Effects of Ambient Air Pressure on Femtosecond Laser Induced Periodic Ripple Structure on Chromium Films.Guangzi Xuebao/Acta Photonica Sinica,47(7).
MLA Liu, Qi,et al."Effects of Ambient Air Pressure on Femtosecond Laser Induced Periodic Ripple Structure on Chromium Films".Guangzi Xuebao/Acta Photonica Sinica 47.7(2018).
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