Design of micro-optical system for laser displacement sensor sensing probe

doi:10.3788/CO.20181106.1001

CIOMP OpenIR

	Design of micro-optical system for laser displacement sensor sensing probe
	Zhang, Shuang; Zhu, Wan-Bin; Li, Jian; Lu, Xiu- E.
	2018
发表期刊	Chinese Optics
ISSN	20951531
卷号	11 期号:6 页码:1001-1010
摘要	Spot quality can directly affect the measuring accuracy of laser displacement sensor. In order to improve the imaging quality of sensing probe optical system for the laser displacement sensor, a four-piece micro-optical system for sensing probes is designed. Based on the ideal imaging, we analyze the law of energy transfer in the optical system, compare the sensitivity of the photoelectric detector, and use the optical design software ZEMAX to realize the design of the micro-optical system of the laser displacement sensor. Through theoretical calculation and analysis, the size of the aperture of the sensing probe is strictly controlled, and the optical system is optimized. As a result, the maximum radius of spot is 3.226 m, the value of Modulation Transfer Function(MTF) is over 0.5 when the spatial resolution is confined within the boundary of 120 lp/mm, the error of Ray Fan is 5 m or less and the maximum distortion is less than 0.185 9%. The optical system has a good imaging effect, so that the laser displacement sensor detection system can meet the imaging spot quality requirements of the imaging system to ensure that the measurement accuracy of the sensor is better than 5 m. 2018, China Science Publishing & Media LTD. All right reserved.
关键词	Optical systems Displacement measurement Energy transfer Optical design Probes
DOI	10.3788/CO.20181106.1001
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60621
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Shuang,Zhu, Wan-Bin,Li, Jian,et al. Design of micro-optical system for laser displacement sensor sensing probe[J]. Chinese Optics,2018,11(6):1001-1010.
APA	Zhang, Shuang,Zhu, Wan-Bin,Li, Jian,&Lu, Xiu- E..(2018).Design of micro-optical system for laser displacement sensor sensing probe.Chinese Optics,11(6),1001-1010.
MLA	Zhang, Shuang,et al."Design of micro-optical system for laser displacement sensor sensing probe".Chinese Optics 11.6(2018):1001-1010.

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