Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm

doi:10.3788/gzxb20184704.0431001

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	Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm
	Kuang, Shang-Qi; Zhang, Chao; Li, Shuo; Yang, Hai-Gui; Huo, Tong-Lin; Zhou, Hong-Jun
	2018
发表期刊	Guangzi Xuebao/Acta Photonica Sinica
ISSN	10044213
卷号	47 期号:4
摘要	Quantum state genetic algorithm was applied into the discrete design of broadband extreme-ultraviolet multilayer to solve the problem of solving accuracy in genetic algorithm. And the discrete design of layer thickness can be achieved in the process of quantum state genetic algorithm. It solves the problem that the layer can be accurately fabricated when the magnetron sputtering system is controlled by the deposition time. According to the results designed by quantum state genetic algorithm, broadband extreme-ultraviolet multilayers have been fabricated by magnetron sputtering system. The measured results show two kinds of multilayers designed by quantum state genetic algorithm were fabricated, one has a reflectivity of more than 45% in the 0~15 range of incidence angle, and the other reaches the reflectivity of more than 20% for the wavelength range from 13 nm to 15 nm. The relative work shows the potential value of quantum state genetic algorithm and offers another alternative optimizing algorithm in the field of broadband extreme-ultraviolet multilayer design. And then the algorithm can achieve the discrete design of multilayer, which makes fabricated multilayer have better spectral properties. 2018, Science Press. All right reserved.
关键词	Quantum theory Fabrication Genetic algorithms Magnetron sputtering Multilayers Reflection
DOI	10.3788/gzxb20184704.0431001
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60607
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Kuang, Shang-Qi,Zhang, Chao,Li, Shuo,et al. Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm[J]. Guangzi Xuebao/Acta Photonica Sinica,2018,47(4).
APA	Kuang, Shang-Qi,Zhang, Chao,Li, Shuo,Yang, Hai-Gui,Huo, Tong-Lin,&Zhou, Hong-Jun.(2018).Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm.Guangzi Xuebao/Acta Photonica Sinica,47(4).
MLA	Kuang, Shang-Qi,et al."Design and Fabrication of Broadband Discrete Extreme-ultraviolet Multilayer Based on Quantum State Genetic Algorithm".Guangzi Xuebao/Acta Photonica Sinica 47.4(2018).

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