Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer | |
Zhang, Lu; Xiang, Yang![]() | |
2018 | |
发表期刊 | Zhongguo Jiguang/Chinese Journal of Lasers
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ISSN | 2587025 |
卷号 | 45期号:8 |
摘要 | The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm. 2018, Chinese Lasers Press. All right reserved. |
关键词 | Shearing Aberrations Errors Interferometers Measurement Wavefronts |
DOI | 10.3788/CJL201845.0804008 |
收录类别 | EI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/60599 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | Zhang, Lu,Xiang, Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2018,45(8). |
APA | Zhang, Lu,&Xiang, Yang.(2018).Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer.Zhongguo Jiguang/Chinese Journal of Lasers,45(8). |
MLA | Zhang, Lu,et al."Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer".Zhongguo Jiguang/Chinese Journal of Lasers 45.8(2018). |
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