Analysis and experimental study of low-stepped mirror in light FTIRS

doi:10.1007/s11801-018-8047-4

CIOMP OpenIR

	Analysis and experimental study of low-stepped mirror in light FTIRS
	Zhang, Min; Liang, Jing-qiu; Lu, Jin-guang; Liang, Zhong-zhu; Qin, Yu-xin; Wang, Wei-biao
	2018
发表期刊	Optoelectronics Letters
ISSN	16731905
卷号	14 期号:6 页码:405-410
摘要	The structural parameters of low-stepped mirror which is the core component of a light Fourier transform infrared spectrometer (FTIRS) have important influence on the performance of the instrument. A simple method of multiple deposition is proposed to fabricate a low-stepped mirror with step height of 625 nm, for its high precision, high efficiency and miniaturization. So the film stress will be introduced in the process of coating, which can lead to step deformation. We build a bending model of the low-stepped mirror and analyze the influence of its deformation. The light intensity and spectrum are changed by the step deformation. Therefore, the film stress should be reduced in order to ensure the accuracy of the spectral information. Increasing the thickness of substrate is proposed in this paper to reduce the step deformation, besides adjusting the coating temperature and adding sub-layer. Our results reveal that the basic requirements of the system are satisfied when the thickness of the substrate is 5 mm in the appropriate coating environment. An FTIRS based on stepped mirrors and grid beam splitter is assembled and corresponding experiment is carried out to obtain the spectrum curve of acetonitrile. 2018, Tianjin University of Technology and Springer-Verlag GmbH Germany, part of Springer Nature.
关键词	Mirrors Coatings Deformation Fourier transform infrared spectroscopy
DOI	10.1007/s11801-018-8047-4
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/60574
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, Min,Liang, Jing-qiu,Lu, Jin-guang,et al. Analysis and experimental study of low-stepped mirror in light FTIRS[J]. Optoelectronics Letters,2018,14(6):405-410.
APA	Zhang, Min,Liang, Jing-qiu,Lu, Jin-guang,Liang, Zhong-zhu,Qin, Yu-xin,&Wang, Wei-biao.(2018).Analysis and experimental study of low-stepped mirror in light FTIRS.Optoelectronics Letters,14(6),405-410.
MLA	Zhang, Min,et al."Analysis and experimental study of low-stepped mirror in light FTIRS".Optoelectronics Letters 14.6(2018):405-410.

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