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Hybrid-level Fresnel zone plate for diffraction efficiency enhancement
Zhang, Z.; C. Guo; R. Wang; H. Hu; X. Zhou; T. Liu; D. Xue; X. Zhang; F. Zhang and X. Zhang
2017
发表期刊Optics Express
卷号25期号:26
摘要The Fresnel Zone Plate (FZP) is widely used in a variety of applications. However, the most concerning drawback of the FZP is its low diffraction efficiency limited by fabrication capability. The diffraction efficiency of an FZP with a surface-relief profile can reach 100% at a specified diffracted order, however, this is difficult to engineer in a precise manner. In this paper, a hybrid-level FZP (HLFZP) is proposed to maximize the diffraction efficiency under a certain lithography condition. To theoretically verify this enhancement, the diffracted field of the HLFZP is derived by establishing a diffraction model. According to different machining capabilities, the design criteria for the level number distribution on the HLFZP are presented. Simulated results show significant improvement in imaging quality while comparing the diffraction efficiency of the specifically designed 8-4-2 HLFZP to that of the traditional 2-level FZP. Fabrication processes for the 8-4-2 HLFZP are developed, with experimental results indicating that the diffraction efficiency could be improved by 54% using the proposed HLFZP, compared to the traditional 2-level FZP. The root mean square (RMS) of the wavefront error for the 8-4-2 HLFZP is 1/20 ( = 632.8 nm), and imaging results are good as the predicted results. It is concluded that the proposed hybrid-level method is also promising for improving the diffraction efficiency of other diffractive optical elements. 2017 Optical Society of America.
收录类别sci ; ei
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59464
专题中科院长春光机所知识产出
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GB/T 7714
Zhang, Z.,C. Guo,R. Wang,et al. Hybrid-level Fresnel zone plate for diffraction efficiency enhancement[J]. Optics Express,2017,25(26).
APA Zhang, Z..,C. Guo.,R. Wang.,H. Hu.,X. Zhou.,...&F. Zhang and X. Zhang.(2017).Hybrid-level Fresnel zone plate for diffraction efficiency enhancement.Optics Express,25(26).
MLA Zhang, Z.,et al."Hybrid-level Fresnel zone plate for diffraction efficiency enhancement".Optics Express 25.26(2017).
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