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Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
Zhang, C.; J. Zhang; Y. Wang; S. Kuang and Y. Xie
2017
发表期刊Guangxue Xuebao/Acta Optica Sinica
卷号37期号:6
摘要A design approach of the theoretical film system with broad-angle extreme ultraviolet (EUV) multilayers coatings based on the real-coded quantum evolutionary algorithm (RQEA) is proposed. Based on the RQEA and the real-coded genetic algorithm (RGA), the theoretical design and analysis for Mo/Si multilayers coatings with broad angles is performed. It is found that the RQEA has obvious advantages of small population, high efficiency, and high accuracy, which makes the RQEA possess potential application value in the field of optical film design. In addition, the broadband Mo/Si multilayer coatings with reflectivity of up to 50% at incidence angle of 0-18 and at incident wavelength of 13.5 nm are designed. 2017, Chinese Lasers Press. All right reserved.
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语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59416
专题中科院长春光机所知识产出
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Zhang, C.,J. Zhang,Y. Wang,et al. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Guangxue Xuebao/Acta Optica Sinica,2017,37(6).
APA Zhang, C.,J. Zhang,Y. Wang,&S. Kuang and Y. Xie.(2017).Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm.Guangxue Xuebao/Acta Optica Sinica,37(6).
MLA Zhang, C.,et al."Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm".Guangxue Xuebao/Acta Optica Sinica 37.6(2017).
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