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Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
Zhang, C.; J. Zhang; Y. Wang; S. Kuang and Y. Xie
2017
Source PublicationGuangxue Xuebao/Acta Optica Sinica
Volume37Issue:6
AbstractA design approach of the theoretical film system with broad-angle extreme ultraviolet (EUV) multilayers coatings based on the real-coded quantum evolutionary algorithm (RQEA) is proposed. Based on the RQEA and the real-coded genetic algorithm (RGA), the theoretical design and analysis for Mo/Si multilayers coatings with broad angles is performed. It is found that the RQEA has obvious advantages of small population, high efficiency, and high accuracy, which makes the RQEA possess potential application value in the field of optical film design. In addition, the broadband Mo/Si multilayer coatings with reflectivity of up to 50% at incidence angle of 0-18 and at incident wavelength of 13.5 nm are designed. 2017, Chinese Lasers Press. All right reserved.
Indexed Byei
Language中文
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59416
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Zhang, C.,J. Zhang,Y. Wang,et al. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Guangxue Xuebao/Acta Optica Sinica,2017,37(6).
APA Zhang, C.,J. Zhang,Y. Wang,&S. Kuang and Y. Xie.(2017).Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm.Guangxue Xuebao/Acta Optica Sinica,37(6).
MLA Zhang, C.,et al."Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm".Guangxue Xuebao/Acta Optica Sinica 37.6(2017).
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