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Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement
Yang, J.; R. Zhang; L. Yin; C. Sun and T. J. Li
2017
发表期刊Applied Optics
卷号56期号:2
摘要Stray light is one of the important factors for evaluating the quality of gratings. Therefore, it has become an important problem in the field of grating development to measure the stray light of planar diffraction gratings accurately. For that reason, a planar grating stray light testing instrument based on a Czerny-Turner (C-T) structure has been studied. On the premise of the low stray light of the instrument itself, the instrument is capable of measuring wideband, variable aperture, and high resolution stray light for planar gratings. A scatterometer dynamic range of over nine orders has been demonstrated. Based on the scalar diffraction theory and classical Fresnel-Kirchhoff diffraction theory, the optical and mechanical model of the scatterometer is designed, which is irradiated by parallel light, and the simulation results are analyzed. The instrument realizes the measurement of the grating distribution function (GDF). And with reference to the expression form of the bidirectional reflectance distribution function (BRDF), the measurement data of the instrument is associated with the power spectral density (PSD). Through the optical integrated design and stray light suppression design, full aperture (15 mm x 15 mm-200 mm x 200 mm) and wideband (380-900 nm) measurement for any number of lines grating is realized, and the efficiency of equipment usage is improved. Experimental results show that based on the attenuation method, the accuracy of measurement can be 10(-9) by the replacement of the neutral density filters. (C) 2017 Optical Society of America
收录类别sci ; ei
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59378
专题中科院长春光机所知识产出
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Yang, J.,R. Zhang,L. Yin,et al. Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement[J]. Applied Optics,2017,56(2).
APA Yang, J.,R. Zhang,L. Yin,&C. Sun and T. J. Li.(2017).Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement.Applied Optics,56(2).
MLA Yang, J.,et al."Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement".Applied Optics 56.2(2017).
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