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Large-diameter high-efficiency diffractive Fresnel membrane elements for space telescope
Wang, R.; Z. Zhang; D. Xue and X. Zhang
2017
发表期刊Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
卷号46期号:9
摘要For the purpose of fabricating large aperture, light-weighted, and high efficiency diffractive elements, the design of microstructure and fabrication technology of diffractive Fresnel membrane elements were proposed. A 4-step diffractive membrane with 320 mm diameter and F/#100 was designed by Zemax software. The continuous phase distribution was transformed into discrete steps by Matlab software. The fabrication processing chain of membrane diffractive element was studied. Using polyimide film as membrane material and fused silica as substrate, the PI membrane with thickness of 20 m was fabricated through multi-times spin-coating. The mechanical structure of membrane fixture was designed by using Solidworks software. The measurement results of corresponding position of membrane and glass substrate show that line width errors is less than 1.3%, and the step depth errors is less than 8.6%. The diffraction efficiency in wavelength of 632.8 nm is 71.5%, which is 88% of theoretical value. It can be concluded that the membrane has light weighted structure, high replicated accuracy, and high diffraction efficiency, which meets the requirement of space-based telescope. 2017, Editorial Board of Journal of Infrared and Laser Engineering. All right reserved.
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语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/59269
专题中科院长春光机所知识产出
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Wang, R.,Z. Zhang,D. Xue and X. Zhang. Large-diameter high-efficiency diffractive Fresnel membrane elements for space telescope[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2017,46(9).
APA Wang, R.,Z. Zhang,&D. Xue and X. Zhang.(2017).Large-diameter high-efficiency diffractive Fresnel membrane elements for space telescope.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,46(9).
MLA Wang, R.,et al."Large-diameter high-efficiency diffractive Fresnel membrane elements for space telescope".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 46.9(2017).
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