CIOMP OpenIR  > 中科院长春光机所知识产出
Weighted iterative algorithm for beam alignment in scanning beam interference lithography
Song, Y.; W. Wang; S. Jiang; Bayanheshig and N. Zhang
2017
Source PublicationApplied Optics
Volume56Issue:31
AbstractTo obtain low phase errors and good interference fringe contrast, an automated beam alignment system is used in scanning beam interference lithography. In the original iterative algorithm, if the initial beam deviation is large or the optical parameters are inappropriate, the beam angle (or position) overshoot may exceed the detector's range. To solve this problem, a weighted iterative algorithm is proposed in which the beam angle and position overshoots can be suppressed by adjusting the weighting coefficients. The original iterative algorithm is introduced. The weighted iterative algorithm is then presented and its convergence is analyzed. Simulation and experimental results show that the proposed weighted iterative algorithm can reduce the beam angle and position overshoots at the expense of convergence speed, avoiding the alignment failure caused by exceeding the detector's range. Besides, the original and weighted iterative algorithms can be combined to optimize the iteration. (C) 2017 Optical Society of America
Indexed Bysci ; ei
Language英语
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59196
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Song, Y.,W. Wang,S. Jiang,et al. Weighted iterative algorithm for beam alignment in scanning beam interference lithography[J]. Applied Optics,2017,56(31).
APA Song, Y.,W. Wang,S. Jiang,&Bayanheshig and N. Zhang.(2017).Weighted iterative algorithm for beam alignment in scanning beam interference lithography.Applied Optics,56(31).
MLA Song, Y.,et al."Weighted iterative algorithm for beam alignment in scanning beam interference lithography".Applied Optics 56.31(2017).
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