Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model

	Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model
	Song, C.; X. Zhang; X. Zhang; H. Hu and X. Zeng
	2017
发表期刊	Photonic Sensors
卷号	7 期号:2
摘要	A rigid conformal (RC) lap can smooth mid-spatial-frequency (MSF) errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting tool speed of 300 RPM were o. 2017, The Author(s).
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/59189
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song, C.,X. Zhang,X. Zhang,et al. Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model[J]. Photonic Sensors,2017,7(2).
APA	Song, C.,X. Zhang,X. Zhang,&H. Hu and X. Zeng.(2017).Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model.Photonic Sensors,7(2).
MLA	Song, C.,et al."Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model".Photonic Sensors 7.2(2017).

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