Monolithic Microlens VCSELs With High Beam Quality

	Monolithic Microlens VCSELs With High Beam Quality
	Huang, Y. W.; X. Zhang; J. W. Zhang; Y. Y. Xie; W. Hofmann; Y. Q. Ning and L. J. Wang
	2017
发表期刊	Ieee Photonics Journal
卷号	9 期号:4
摘要	In this paper, we report on high beam quality vertical-cavity surface-emitting lasers (VCSELs) featuring a monolithically integrated aspherical microlens. This lens is fabricated by a one-step diffusion-limited wet etch process. VCSELs with microlenses with different curvature radius are designed, fabricated, and characterized, as well as reference VCSEL devices without the microlens. Significant improvement of beam divergence and single-mode performance are demonstrated in microlens VCSELs. The divergence angles of a conventional VCSEL are 14.5 degrees, 16.0 degrees, and 17.0 degrees (full width at D4 sigma) at 2 mA, 3 mA, and 4 mA, respectively, with a M-2 value measured to be 6.9 at 3 mA. Under the same current injection, the divergence angles of a comparable VCSEL with a micro-lens (curvature radius of 31.8 mu m) are reduced to 4.8 degrees, 5.5 degrees, and 5.7 degrees, respectively. The M-2 value of the lensed VCSEL is as low as 1.9 at 3 mA.
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/58953
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Huang, Y. W.,X. Zhang,J. W. Zhang,et al. Monolithic Microlens VCSELs With High Beam Quality[J]. Ieee Photonics Journal,2017,9(4).
APA	Huang, Y. W.,X. Zhang,J. W. Zhang,Y. Y. Xie,W. Hofmann,&Y. Q. Ning and L. J. Wang.(2017).Monolithic Microlens VCSELs With High Beam Quality.Ieee Photonics Journal,9(4).
MLA	Huang, Y. W.,et al."Monolithic Microlens VCSELs With High Beam Quality".Ieee Photonics Journal 9.4(2017).

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