Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology

	Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology
	He, Y. W.; X. Hou; F. Wu; X. X. Ma and R. G. Liang
	2017
发表期刊	Optics Express
卷号	25 期号:17
摘要	Computer-generated hologram (CGH) has been widely used as a wavefront compensator in symmetric aspheric metrology. As a diffractive element, it generates different diffraction orders, but only the 1st-order diffraction is used to test aspheric surface. The light from spurious diffraction orders (SDO) will produce many high-frequency fringes in interferogram and reduce measurement accuracy. In this paper, we regard the CGH null system as an imaging system and develop an aberration model in Seidel formalism to analyze the SDO. This model has the advantage to address the difference between the SDO (k(1), k(2)) and (k(2), k(1)). We consider the effect of the pupil distortion so that our model can analyze the SDO with a large pupil distortion. We derive the condition to ensure the 2nd-order and 4th-order aberrations have the same sign and calculate the minimum defocused distance (power carrier frequency) of CGH. According to the marginal-ray heights (h(1) and h(3)) on the CGH in the first and second passes, we determine the condition that the SDO covers the whole CGH in the second pass. We analyze the SDO of 4 CGH designs and compare the results from our aberration model with these from real ray trace. These results validate that our aberration model is feasible whether the aspheric part is convex or concave and whether CGH is inside or outside the focus of the transmission sphere. (C) 2017 Optical Society of America
收录类别	sci ; ei
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/58942
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	He, Y. W.,X. Hou,F. Wu,et al. Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology[J]. Optics Express,2017,25(17).
APA	He, Y. W.,X. Hou,F. Wu,&X. X. Ma and R. G. Liang.(2017).Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology.Optics Express,25(17).
MLA	He, Y. W.,et al."Analysis of spurious diffraction orders of computer-generated hologram in symmetric aspheric metrology".Optics Express 25.17(2017).

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