The relationship between the dislocations and microstructure in In0.82Ga0.18As/InP heterostructures

	The relationship between the dislocations and microstructure in In0.82Ga0.18As/InP heterostructures
	Zhao, L.; Z. X. Guo; Q. L. Wei; G. Q. Miao and L. Zhao
	2016
发表期刊	Scientific Reports
卷号	6
摘要	To meet the requirements of X/Y/ adjustment in a lithography projection lens, a 3-RRR flexure parallel mechanism used in lens micro-adjustment was developed and its forward kinematics was researched. Firstly, the pseudo-rigid body model of the 3-RRR flexure parallel mechanism was established, the forward kinematic solution of the 3-RRR parallel mechanism was derived based on vector mathematical theory, and its theoretical Jacobian matrix was obtained. Then, the Finite Element Model(FEM) of the 3-RRR parallel mechanism was established in NX NASTRAN environment, and the FEM forward kinematic solution and the FEM Jacobian matrix were obtained. Finally, according to the experiment of the 3-RRR flexure parallel mechanism, the actual forward kinematic solution and the actual Jacobian matrix were acquired. The experiment results show that: the parameters of the actual Jacbian matrix are 0.5777, -0.304 0, -0.283 3, 0.002 1, 0.524 6, -0.516 5, 1.402 6, 1.481 9, 1.435 3, while the parameters of the theoretical Jacbian matrix are 0.612 9, -0.306 5, -0.306 5, 0, 0.530 8, -0.530 8, 1.444 6, 1.444 6, 1.444 6, respectively. The experiment results demonstrate that the forward kinematics can be exactly derived by the vector mathematical theory. The forward kinematic equation method for the 3-RRR flexure parallel mechanism is feasible when designing micro-motion mechanisms. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57468
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao, L.,Z. X. Guo,Q. L. Wei,et al. The relationship between the dislocations and microstructure in In0.82Ga0.18As/InP heterostructures[J]. Scientific Reports,2016,6.
APA	Zhao, L.,Z. X. Guo,Q. L. Wei,&G. Q. Miao and L. Zhao.(2016).The relationship between the dislocations and microstructure in In0.82Ga0.18As/InP heterostructures.Scientific Reports,6.
MLA	Zhao, L.,et al."The relationship between the dislocations and microstructure in In0.82Ga0.18As/InP heterostructures".Scientific Reports 6(2016).

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