Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors

	Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors
	Zhang, D.; X. Li; C. Ge; M. Ni and K. Guo
	2016
发表期刊	Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
卷号	37 期号:6
摘要	When CaF2materials are used in projection lenses, the performance of the projection lenses can be improved greatly. This paper researches the process of CaF2crystal fabrication to realize its high precision optical fabrication in all wave bands. Firstly, the pitch lap and the diamond powder were used to get a relative better figure and surface quality of a CaF2element. Then, the technological parameters of the polishing lap, such as rotation speed, movement range and pressure were optimized, and the colloidal silica was used in polishing to reduce the high frequency errors in the CaF2element, remove the scratch in machining and to obtain a smaller mid-spatial error and smaller higher frequency roughness. Finally, the ion beam figuring technique was used to repair finely the surface figure of the element meanwhile maintaining the high frequency error in the CaF2element. The Experiments were conduct on a CaF2crystal plane with a diameter of 100 mm, and the results indicate that its 37 Zernike fit error and the Zernike residual error reach to 0.39 nm RMS and 0.43 nm RMS, respectively, and the roughness reaches to 0.31 nm on average. These results satisfy the nanometer machining requirements of the projection lens, and lay a basis for development of the high performance projection lenses. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57405
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang, D.,X. Li,C. Ge,et al. Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors[J]. Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,2016,37(6).
APA	Zhang, D.,X. Li,C. Ge,&M. Ni and K. Guo.(2016).Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors.Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,37(6).
MLA	Zhang, D.,et al."Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors".Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument 37.6(2016).

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