One-step synthesis and the enhanced xylene-sensing properties of Fe-doped MoO3 nanobelts

	One-step synthesis and the enhanced xylene-sensing properties of Fe-doped MoO3 nanobelts
	Xu, R. L.; N. Zhang; L. Sun; C. A. Chen; Y. Chen; C. N. Li and S. P. Ruan
	2016
发表期刊	Rsc Advances
卷号	6 期号:108
摘要	For the manufacture of a lithographic lens with a 45 nm node, this paper focuses on the development of high numerical aperture (NA), deep ultraviolet (DUV) immersion lithographic lenses. Firstly, an off-axis three mirror projection lithographic objective with the NA of 1.30 and a coaxial two mirror projection lithographic objective with the NA of 1.35 were designed. Two design methods and results were compared and the latter was chosen to be used final design. Then, the relationship between variable stop aperture and telecentricity under different NAs was analyzed. A scheme of dual variable curved apertures was proposed to reduce the image telecentricity of a lithographic lens. The final results show that both wavefront errors(Root Mean Square, RMS) and distortion of the lithographic lens are less than 1 nm by using the proposed scheme. The new scheme with dual variable curved apertures makes the maximum telecentricity decreases from 5.83-17.57 mrad to 0.26-3.21 mrad when NA varies from 0.85 to 1.35. This scheme provides an advantageous theoretical guidance and basis for research and development of the lithographic lens with 45 nm node. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57318
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xu, R. L.,N. Zhang,L. Sun,et al. One-step synthesis and the enhanced xylene-sensing properties of Fe-doped MoO3 nanobelts[J]. Rsc Advances,2016,6(108).
APA	Xu, R. L.,N. Zhang,L. Sun,C. A. Chen,Y. Chen,&C. N. Li and S. P. Ruan.(2016).One-step synthesis and the enhanced xylene-sensing properties of Fe-doped MoO3 nanobelts.Rsc Advances,6(108).
MLA	Xu, R. L.,et al."One-step synthesis and the enhanced xylene-sensing properties of Fe-doped MoO3 nanobelts".Rsc Advances 6.108(2016).

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