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Graphene applied to GaN based materals
Xu, C.-Y.
2016
发表期刊Faguang Xuebao/Chinese Journal of Luminescence
卷号37期号:7
摘要The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from power. In order to analyze the effect of misalignment errors, the relation between alignment parameters and test results of axisymmetric optics is presented. Analytical solutions of SAP system errors from tested mirror misalignment, arm length L deviation, tilt-angle. deviation, air-table spin error, and air-table misalignment are derived, respectively; and misalignment tolerance is given to guide surface measurement. In addition, experiments on a 2-m diameter parabolic mirror are demonstrated to verify the model; according to the error budget, we achieve the SAP test for low-order errors except power with accuracy of 0.1 mu m root-mean-square. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
文章类型期刊
收录类别EI
语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/57307
专题中科院长春光机所知识产出
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Xu, C.-Y.. Graphene applied to GaN based materals[J]. Faguang Xuebao/Chinese Journal of Luminescence,2016,37(7).
APA Xu, C.-Y..(2016).Graphene applied to GaN based materals.Faguang Xuebao/Chinese Journal of Luminescence,37(7).
MLA Xu, C.-Y.."Graphene applied to GaN based materals".Faguang Xuebao/Chinese Journal of Luminescence 37.7(2016).
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