Changchun Institute of Optics,Fine Mechanics and Physics,CAS
MEMS gyro denoising by EMD-HOS method | |
Wang, Y.-D.; T. Zhang; C.-L. Yang and J.-W. Ma | |
2016 | |
发表期刊 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering |
卷号 | 24期号:3 |
摘要 | We propose the use of thin Ag film deposition to remedy the degradation of near-infrared (NIR) absorption of black Si caused by high-temperature thermal annealing. A large amount of random and irregular Ag nanoparticles are formed on the microstructural surface of black Si after Ag film deposition, which compensates the degradation of NIR absorption of black Si caused by thermal annealing. The formation of Ag nanoparticles and their contributions to NIR absorption of black Si are discussed in detail. |
文章类型 | 期刊 |
收录类别 | EI |
语种 | 中文 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/57266 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Wang, Y.-D.,T. Zhang,C.-L. Yang and J.-W. Ma. MEMS gyro denoising by EMD-HOS method[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(3). |
APA | Wang, Y.-D.,T. Zhang,&C.-L. Yang and J.-W. Ma.(2016).MEMS gyro denoising by EMD-HOS method.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(3). |
MLA | Wang, Y.-D.,et al."MEMS gyro denoising by EMD-HOS method".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.3(2016). |
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MEMS gyro denoising (1835KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
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