Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method | |
| Long, S. W.; Y. F. Li; B. Yao; Z. H. Ding; Y. Xu; G. Yang; R. Deng; Z. Y. Xiao; D. X. Zhao; Z. Z. Zhang; L. G. Zhang and H. F. Zhao | |
| 2016 | |
| 发表期刊 | Thin Solid Films
 |
| 卷号 | 600 |
| 摘要 | For the profile deviation of a stage mirror itself and the profile change caused by the alignment of 2D stage position, an online detection method for the profile deviation of a nano precision 2-D stage mirror was presented. The basic principle of detecting profile differential data with two interferometers was proposed. The influences of zero error and integral error on the measurement were analyzed and a method to improve the measuring precision was put forward. Two sets of original data of the mirror profile were obtained by two sets of detectors with different spans composed by three interferometers. Through the relationship between the two sets of data, the detail profile deviation between the spans was modified. The theoretical calculation, simulation and experiments for the proposed method were performed, and obtained results were compared with that of off-line measurement with a Zygo interferometer. The results show that the most difference in test results is between 10 nm, and the trend has better consistency, which verify that this measuring method could measure the profile deviation of stage mirrors correctly and could restore its surface errors truly. 2016, Science Press. All right reserved. |
| 文章类型 | 期刊 |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/57105 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Long, S. W.,Y. F. Li,B. Yao,et al. Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method[J]. Thin Solid Films,2016,600. |
| APA | Long, S. W..,Y. F. Li.,B. Yao.,Z. H. Ding.,Y. Xu.,...&L. G. Zhang and H. F. Zhao.(2016).Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method.Thin Solid Films,600. |
| MLA | Long, S. W.,et al."Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method".Thin Solid Films 600(2016). |
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| Effect of doping beh（780KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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