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Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method
Long, S. W.; Y. F. Li; B. Yao; Z. H. Ding; Y. Xu; G. Yang; R. Deng; Z. Y. Xiao; D. X. Zhao; Z. Z. Zhang; L. G. Zhang and H. F. Zhao
2016
发表期刊Thin Solid Films
卷号600
摘要For the profile deviation of a stage mirror itself and the profile change caused by the alignment of 2D stage position, an online detection method for the profile deviation of a nano precision 2-D stage mirror was presented. The basic principle of detecting profile differential data with two interferometers was proposed. The influences of zero error and integral error on the measurement were analyzed and a method to improve the measuring precision was put forward. Two sets of original data of the mirror profile were obtained by two sets of detectors with different spans composed by three interferometers. Through the relationship between the two sets of data, the detail profile deviation between the spans was modified. The theoretical calculation, simulation and experiments for the proposed method were performed, and obtained results were compared with that of off-line measurement with a Zygo interferometer. The results show that the most difference in test results is between 10 nm, and the trend has better consistency, which verify that this measuring method could measure the profile deviation of stage mirrors correctly and could restore its surface errors truly. 2016, Science Press. All right reserved.
文章类型期刊
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/57105
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Long, S. W.,Y. F. Li,B. Yao,et al. Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method[J]. Thin Solid Films,2016,600.
APA Long, S. W..,Y. F. Li.,B. Yao.,Z. H. Ding.,Y. Xu.,...&L. G. Zhang and H. F. Zhao.(2016).Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method.Thin Solid Films,600.
MLA Long, S. W.,et al."Effect of doping behaviors of Ag and S on the formation of p-type Ag-S co-doped ZnO film by a modified hydrothermal method".Thin Solid Films 600(2016).
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