Topology optimization design for main frame of infrared seeker's stabilization platform

	Topology optimization design for main frame of infrared seeker's stabilization platform
	Liu, Z.; T. Zhang; P. Wang and T. Wang
	2016
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
卷号	45 期号:2
摘要	In order to eliminate the surface microdefect after the direct polishing of RB-SiC substrate, reduce the surface roughness and increase the surface quality, Si was selected as the modified material based on the features of large aperture SiC, where a 2 m-level RB-SiC substrate was modificated by using the magnetron sputtering technology. The silicon film was deposited by a developed 3.2 m magnetron sputtering coating machine, and the SiC substrate was polished and modificated based on the computer control optical molding method. The result indicates that the thickness of modified level reaches 15 m; the thickness uniformity of the film level is better than 2.5% within the diameter of 2.04 m; the surface roughness decreases from 5.64 nm (RMS) to 0.78 nm. Therefore a the magnetron sputtering technology can be used in the surface modification of the large aperture RB-SiC, and the performance of the modificated RB-SiC substrate can meet the requirements of high-quality optical systems. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57103
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu, Z.,T. Zhang,P. Wang and T. Wang. Topology optimization design for main frame of infrared seeker's stabilization platform[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2016,45(2).
APA	Liu, Z.,T. Zhang,&P. Wang and T. Wang.(2016).Topology optimization design for main frame of infrared seeker's stabilization platform.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,45(2).
MLA	Liu, Z.,et al."Topology optimization design for main frame of infrared seeker's stabilization platform".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 45.2(2016).

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