In the manufacturing process of high-precision photolithography lens, clocking of lens element is a commonly used and efficient method to compensate the surface figure error. This method obtains the optimal azimuth angles of a lens element. With complex description of the surface figure error, developing a mathematical model to optimize the azimuth angle of the element is difficult. This work expresses the surface figure error and wavefront aberration of a lens system with Zernike polynomials. Results indicate that the surface figure error is linearly correlated with the induced wavefront aberration at any point field of view. Thus, a mathematical model adopting this linear relationship is proposed to optimize the azimuth angles of a lens element. Employing the proposed mathematical model, the optimization keeps good efficiency and precision. The clocking optimization instance confirms that the mathematical model is effective for clocking optimization. (C) 2016 Elsevier B.V. All rights reserved.
Liu, C. Y.,Z. S. Su,W. L. Li,et al. Improved performance of perovskite solar cells with a TiO2/MoO3 core/shell nanoparticles doped PEDOT:PSS hole-transporter[J]. Organic Electronics,2016,33.
APA
Liu, C. Y..,Z. S. Su.,W. L. Li.,F. M. Jin.,B. Chu.,...&J. X. Tang and B. N. Kang.(2016).Improved performance of perovskite solar cells with a TiO2/MoO3 core/shell nanoparticles doped PEDOT:PSS hole-transporter.Organic Electronics,33.
MLA
Liu, C. Y.,et al."Improved performance of perovskite solar cells with a TiO2/MoO3 core/shell nanoparticles doped PEDOT:PSS hole-transporter".Organic Electronics 33(2016).
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