Structural property investigation on obliquely deposited thick Al films

	Structural property investigation on obliquely deposited thick Al films
	Li, Z. Z.; J. S. Gao; H. G. Yang; Y. C. Wang and T. T. Wang
	2016
发表期刊	Surface Engineering
卷号	32 期号:3
摘要	Crucial requirements were proposed on the Primary Mirror Assembly (PMA), such as high lightweighting, high stiffness, high stability and short manufacturing cycle. In order to satisfy those, a meniscus-like mirror lightweighting scheme based on ZERODUR was designed, and the flexural support structure bonded to the outer ring of the mirror shaft was optimized. Through a finite element analysis and design approach, the optimal dimensions of the flexural support were obtained. In order to verify the finite element analysis results, a modal test was performed on the PMA, and the required aspherical optical surface was polished and tested. Test results show that, the first natural frequency of PMA is 332.5 Hz, the relative deviation is only 2.5% to compare with the analysis result; the surface figure of PMA maintains a constain RMS of /40 while rotating at 0, 120 and 240 around the horizontal optical axis respectively; the influence of zero-gravity state is achieved on surface figure of PMA. The PMA satisfies the design requirements. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57053
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Li, Z. Z.,J. S. Gao,H. G. Yang,et al. Structural property investigation on obliquely deposited thick Al films[J]. Surface Engineering,2016,32(3).
APA	Li, Z. Z.,J. S. Gao,H. G. Yang,&Y. C. Wang and T. T. Wang.(2016).Structural property investigation on obliquely deposited thick Al films.Surface Engineering,32(3).
MLA	Li, Z. Z.,et al."Structural property investigation on obliquely deposited thick Al films".Surface Engineering 32.3(2016).

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