Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films | |
| Gu, Z. Q.; J. F. Wang; C. Q. Hu; X. B. Zhang; J. C. Dang; S. Zhang; J. Gao; X. Y. Wang; H. Chen and W. T. Zheng | |
| 2016 | |
| 发表期刊 | Applied Physics a-Materials Science & Processing
 |
| 卷号 | 122期号:8 |
| 摘要 | It is found that incorporation of tantalum in a hafnium nitride film induces a tunable optical reflectivity and improves the hardness. The underlying mechanism can be illustrated by a combination of experiments and first-principles calculations. It is shown that the evolution of optical reflectivity and the increase in hardness arise from the formation of Hf1-xTaxN solid solutions and the resulting changes in the electronic structure. The increase in infrared reflectance originates from the increase in concentration of free electrons (n) because Ta (d(3)s(2)) has one more valence electron than Hf (d(2)s(2)). The sharp blue-shift in cutoff wavelength is attributed to the increase in n and the appearance of t(2g) -> e(g) interband absorption. These results suggest that alloying of a second transition metal renders an effective avenue to improve simultaneously the optical and mechanical properties of transition metal nitride films. This opens up a door in preparing high-reflectance yet hard films. Published by AIP Publishing. |
| 文章类型 | 期刊 |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56933 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Gu, Z. Q.,J. F. Wang,C. Q. Hu,et al. Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films[J]. Applied Physics a-Materials Science & Processing,2016,122(8). |
| APA | Gu, Z. Q..,J. F. Wang.,C. Q. Hu.,X. B. Zhang.,J. C. Dang.,...&H. Chen and W. T. Zheng.(2016).Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films.Applied Physics a-Materials Science & Processing,122(8). |
| MLA | Gu, Z. Q.,et al."Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films".Applied Physics a-Materials Science & Processing 122.8(2016). |
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| Ion-bombardment-indu（2867KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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