Absolute testing of interferometer wavefront using cat's-eye test

	Absolute testing of interferometer wavefront using cat's-eye test
	Su, D.; E. Miao; Y. Qu and Y. Sui
	2015
发表期刊	Zhongguo Jiguang/Chinese Journal of Lasers
卷号	42 期号:12
摘要	The retrace error is one of the most important factors for high precision testing of Fizeau interferometer. The wavefront of interferometer is the mainly factor of retrace error. So in order to measure the wavefront of interferometer, a method of testing the wavefront of interferometer is proposed, which is based on the measuring function of interferometer itself and is very easy to carry on. Just an additional reflection flat is needed. In this method at least three cat's-eye test results are used to get shearing of the wavefront, which is used to solve the wavefront map by shift-rotation absolute testing algorithm. Experimental results show that the wavefront testing uncertainty is about [root mean square (RMS)] 15 nm without the Power term. It can be utilized to test the wavefront quality of interferometer precisely, and the retrace error farther. 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56379
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Su, D.,E. Miao,Y. Qu and Y. Sui. Absolute testing of interferometer wavefront using cat's-eye test[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(12).
APA	Su, D.,E. Miao,&Y. Qu and Y. Sui.(2015).Absolute testing of interferometer wavefront using cat's-eye test.Zhongguo Jiguang/Chinese Journal of Lasers,42(12).
MLA	Su, D.,et al."Absolute testing of interferometer wavefront using cat's-eye test".Zhongguo Jiguang/Chinese Journal of Lasers 42.12(2015).

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