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Absolute testing of interferometer wavefront using cat's-eye test
Su, D.; E. Miao; Y. Qu and Y. Sui
2015
发表期刊Zhongguo Jiguang/Chinese Journal of Lasers
卷号42期号:12
摘要The retrace error is one of the most important factors for high precision testing of Fizeau interferometer. The wavefront of interferometer is the mainly factor of retrace error. So in order to measure the wavefront of interferometer, a method of testing the wavefront of interferometer is proposed, which is based on the measuring function of interferometer itself and is very easy to carry on. Just an additional reflection flat is needed. In this method at least three cat's-eye test results are used to get shearing of the wavefront, which is used to solve the wavefront map by shift-rotation absolute testing algorithm. Experimental results show that the wavefront testing uncertainty is about [root mean square (RMS)] 15 nm without the Power term. It can be utilized to test the wavefront quality of interferometer precisely, and the retrace error farther. 2015, Science Press. All right reserved.
文章类型期刊论文
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/56379
专题中科院长春光机所知识产出
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GB/T 7714
Su, D.,E. Miao,Y. Qu and Y. Sui. Absolute testing of interferometer wavefront using cat's-eye test[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(12).
APA Su, D.,E. Miao,&Y. Qu and Y. Sui.(2015).Absolute testing of interferometer wavefront using cat's-eye test.Zhongguo Jiguang/Chinese Journal of Lasers,42(12).
MLA Su, D.,et al."Absolute testing of interferometer wavefront using cat's-eye test".Zhongguo Jiguang/Chinese Journal of Lasers 42.12(2015).
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