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Research on geometric parameter measurement method using laser tracker in null lens asphere testing
Chen, X. and R. Li
2015
发表期刊Zhongguo Jiguang/Chinese Journal of Lasers
卷号42期号:5
摘要Traditional measuring methods of geometric parameters of asphere cannot meet the accuracy requirements as the aperture and vertex radius of curvature increase. In order to realize high accuracy measurement of geometric parameters, analysis and measuring methods are studied according to the null lens testing. The theoretical relationship between radius error and conic constant error is compared with the simulation results, then the requirements of measurement and data processing check method are determined. The basic principles of using laser tracker to measure geometric parameters are presented. The feature transformation, modeling and data processing methods are introduced. Experimental results show that the repeating precision of radius, conic constant and off-axis distance are 0.039 mm, 2.0510sup-5/sup and 0.055 mm, respectively. The high repeating accuracy indicates that this method is suitable for geometric parameters measurements, especially for large aperture and long radius aspheres. The absolute accuracy needs to be further analyzed. , 2015, Science Press. All right reserved.
文章类型期刊论文
收录类别EI
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/56364
专题中科院长春光机所知识产出
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GB/T 7714
Chen, X. and R. Li. Research on geometric parameter measurement method using laser tracker in null lens asphere testing[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2015,42(5).
APA Chen, X. and R. Li.(2015).Research on geometric parameter measurement method using laser tracker in null lens asphere testing.Zhongguo Jiguang/Chinese Journal of Lasers,42(5).
MLA Chen, X. and R. Li."Research on geometric parameter measurement method using laser tracker in null lens asphere testing".Zhongguo Jiguang/Chinese Journal of Lasers 42.5(2015).
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