Linearity calibration method of the high-precision displacement sensor

	Linearity calibration method of the high-precision displacement sensor
	Zhang, D.; C. Ge; X. Li; M. Ni; K. Guo and P. Li
	2015
发表期刊	Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
卷号	36 期号:5 页码:982-988
摘要	To address the issue of high-precision displacement adjustment and measurement in optical system, a linearity calibration method of non-contact capacitive displacement sensor is proposed. A calibration platform in which the movement axis, the measurement axis and the sensing axis are collinear is built. The Abbe error is eliminated in the measurement principle. The composition and principle of the calibration method are presented. Symmetrical parallelogram mechanism is used to achieve micro-displacement adjustment. The output compliance and travel stroke of the mechanism are analyzed based on the compliance matrix method (CMM). Results shows that the compliance of the mechanism is 13.585 m/N, and its movement stroke and positioning resolution are 543.4 m and 10 nm respectively. The linearity of the sensor is improved from 0.04714% to 0.00484% after calibration calculation. The linearity calibration method exhibits high-precision, which satisfies the requirement of fine adjustment mechanism of displacement. , 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56355
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang, D.,C. Ge,X. Li,et al. Linearity calibration method of the high-precision displacement sensor[J]. Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,2015,36(5):982-988.
APA	Zhang, D.,C. Ge,X. Li,M. Ni,&K. Guo and P. Li.(2015).Linearity calibration method of the high-precision displacement sensor.Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,36(5),982-988.
MLA	Zhang, D.,et al."Linearity calibration method of the high-precision displacement sensor".Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument 36.5(2015):982-988.

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