Design and integration of the measurement instrument for diffraction efficiency of large echelle

	Design and integration of the measurement instrument for diffraction efficiency of large echelle
	He, X. and X. Cheng
	2015
发表期刊	Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
卷号	36 期号:9 页码:2057-2067
摘要	Diffraction efficiency reflects the design and ruling quality of grating, which is essential for the users and manufacturers. Aiming at the development of China's first 500 mm 400 mm echelle ruling machine, it is necessary to establish a measurement instrument for the diffraction efficiency test to quantitatively evaluate the manufacture level of grating and provide necessary tools for the grating design and manufacture process improvement. Based on serial dispersion subtraction principle, the optical path of conventional C-T structured measuring monochromator is improved. The optical path between pre-monochromator and measurement monochromator is optimized jointly. The multidimensional adjustment stage for grating under test and probe assembly are designed. The calibration method for three grating scanning pre-monochromator with N. A. of 0.1 and the systemati0c error correction method of the test instrument are proposed. Calibration results of pre-monochromator show that the spectral output accuracy is 2 nm within the wavelength range of 190-1 100 nm, and the open accuracy of the programmable slit is 0.002 mm. The measurement accuracy of the corrected diffraction efficiency is 2%, and the repeatability accuracy is 0.5%. The preliminary measurement results show that the developed measurement equipment can meet the requirement of diffraction efficiency quantitative measurement of 500 mm 400 mm large echelle, and achieve the automatic measurement of the continuous curve of diffraction efficiency-wavelength within the operating spectrum range. , 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56351
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	He, X. and X. Cheng. Design and integration of the measurement instrument for diffraction efficiency of large echelle[J]. Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,2015,36(9):2057-2067.
APA	He, X. and X. Cheng.(2015).Design and integration of the measurement instrument for diffraction efficiency of large echelle.Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,36(9),2057-2067.
MLA	He, X. and X. Cheng."Design and integration of the measurement instrument for diffraction efficiency of large echelle".Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument 36.9(2015):2057-2067.

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