Experimental researches on acousto-optic Q-switched COinf2/inf laser

	Experimental researches on acousto-optic Q-switched COinf2/inf laser
	He, Y.; J. Lu; F. Chen; D. Li; C. Zheng; J. Xie and J. Guo
	2015
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
卷号	44 期号:8 页码:2280-2285
摘要	In order to meet the demand of 13.5-nm extreme ultraviolet lithography (EUVL), an acousto-optically Q-switched COinf2/inf laser was developed, which has high repetition rate and high stability. First, the operating principle of the acousto-optic Q-switch was analyzed and the relationship between the voltage of modulated signal and diffraction efficiency was researched experimentally. And then, by studying the influence of modulated signal duty cycle on pulse waveform, the appropriate duty cycle was chosen to eliminate the pulse tail. Under the conditions of different repetition rates, pulse duration, power and the pulse amplitude stability were measured and analyzed. Finally, the beam pointing stability of the laser was measured. Experimental results indicate that the range of pulse repetition rate can be adjusted from 1 kHz to 100 kHz. When the repetition rate is 1 kHz, the minimum pulse duration is 252 ns and the maximum peak power reaches 7 579 W. By designing the support frames mainly made of invar steel, the unstablity of pulse amplitude is less than 3% and the beam pointing stability is only 46.6 rad. This acousto-optic Q-switched COinf2/inf laser is suitable for a seed source used in EUVL. , 2015, Chinese Society of Astronautics. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56270
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	He, Y.,J. Lu,F. Chen,et al. Experimental researches on acousto-optic Q-switched COinf2/inf laser[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2015,44(8):2280-2285.
APA	He, Y.,J. Lu,F. Chen,D. Li,C. Zheng,&J. Xie and J. Guo.(2015).Experimental researches on acousto-optic Q-switched COinf2/inf laser.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,44(8),2280-2285.
MLA	He, Y.,et al."Experimental researches on acousto-optic Q-switched COinf2/inf laser".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 44.8(2015):2280-2285.

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