Design of three DOFs flexure support for FSM driven by piezoelectric ceramics

	Design of three DOFs flexure support for FSM driven by piezoelectric ceramics
	Fang, C.; J. Guo; X. Xu and T. Wang
	2015
发表期刊	Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
卷号	44 期号:10 页码:2987-2994
摘要	Three DOFs elastic support for fast steering mirror driven by piezoelectric is designed in order to effectively absorb the lateral deviation of driving point caused by tilting of mirror, protect the piezoelectric drivers, restrain the DOF in non-working direction and enhance the frequency resonance of system. Firstly the scheme of all-around elastic support which consists of flexure ring and flexure staff was determined according to requirements of fast steering mirror driven by piezoelectric design. Secondly flexure ring and flexure staff was designed separately based on the buckling theory and energy theory. Finally the design was analyzed with FEA software workbench. The FEA analysis shows that the sheer displacement of piezoelectric decreases 86.7% with the application of 8 mm length and 1mm diameter flexure staff. In addition, the application of flexure ring turns the axial translation vibration into the first-order mode with resonance frequency of 340 Hz, turns the swing vibration into the second and the third order mode with resonance frequency of 420 Hz and the higher-order resonance frequency is more than 1000 Hz. The three DOFs elastic support can prevent piezoelectric from sheering damage and help to enhance the resonance frequency of fast steering mirror system, which does help to enhancing the close-loop bandwidth of the system. , 2015, Editorial Board of Journal of Infrared and Laser Engineering. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56259
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Fang, C.,J. Guo,X. Xu and T. Wang. Design of three DOFs flexure support for FSM driven by piezoelectric ceramics[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2015,44(10):2987-2994.
APA	Fang, C.,J. Guo,&X. Xu and T. Wang.(2015).Design of three DOFs flexure support for FSM driven by piezoelectric ceramics.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,44(10),2987-2994.
MLA	Fang, C.,et al."Design of three DOFs flexure support for FSM driven by piezoelectric ceramics".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 44.10(2015):2987-2994.

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压电陶瓷驱动FSM三自由度柔性支撑设计.（958KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览请求全文