Absolute three-flat test in vertical direction with gravity deformation compensation

	Absolute three-flat test in vertical direction with gravity deformation compensation
	Su, D.-Q.; W. Tian; E.-L. Miao; Y.-X. Sui and H.-J. Yang
	2015
发表期刊	Guangzi Xuebao/Acta Photonica Sinica
卷号	44 期号:11
摘要	In order to get lower uncertainty, a method was proposed to compensate the gravity deformation caused by flipping in vertical absolute three-flat test. The gravity deformation of the flat surface was simulated by finite-element software and added to the three-flat test calculation. The calibrated results were compared with shift-rotation absolute testing method, and the root mean square of the surface map difference was less than 1nm without power term. For power term verification, a flat supported on different rings was tested and subtracted. For power term verification, a flat supported on different rings is tested and the difference between the tests and the simulation was less than 9 nm peak to vally, which was usually sufficient for flat power term testing. This experiment also proves the accuracy of the power simulation indirectly, the improved three-flat test can be applied in high precise flat absolute calibration including the power term in vertical direction. 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56236
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Su, D.-Q.,W. Tian,E.-L. Miao,et al. Absolute three-flat test in vertical direction with gravity deformation compensation[J]. Guangzi Xuebao/Acta Photonica Sinica,2015,44(11).
APA	Su, D.-Q.,W. Tian,E.-L. Miao,&Y.-X. Sui and H.-J. Yang.(2015).Absolute three-flat test in vertical direction with gravity deformation compensation.Guangzi Xuebao/Acta Photonica Sinica,44(11).
MLA	Su, D.-Q.,et al."Absolute three-flat test in vertical direction with gravity deformation compensation".Guangzi Xuebao/Acta Photonica Sinica 44.11(2015).

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