Remove trefoil aberration of project objectiveusing lens surface re-polishing technology

	Remove trefoil aberration of project objectiveusing lens surface re-polishing technology
	Zhao, Y.; P. Wang; Z. Shi; Y. Gu; C. Liu and S. Men
	2015
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	35 期号:8
摘要	It is impossible to remove the high order aberrations of minimum aberration project objective only with adjustable structures, which is a bottleneck to restrain further optimization. Ion beam figuring (IBF) instrument is widely used in optical lens manufacturing. IBF can well control low and middle frequency figuring errors to obtain high accuracy figuring polish. The wavefrint error of projection lens small scale model is analyzed using fringe Zernike polynomials, which contains a large amount trefoil aberration. One surfaces of the objective is chosen to remove designated figures using IBF to compensate trefoil aberration of the whole system. Simulation and experiment results show that trefoil aberration is well controlled, and the wavefront error is reduced from 29.6 nm (RMS) to 12.7 nm (RMS). The quality of objective is greatly improved, which proves the corrextness and applicability of this trefoil aberration compensating method. , 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56225
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao, Y.,P. Wang,Z. Shi,et al. Remove trefoil aberration of project objectiveusing lens surface re-polishing technology[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(8).
APA	Zhao, Y.,P. Wang,Z. Shi,Y. Gu,&C. Liu and S. Men.(2015).Remove trefoil aberration of project objectiveusing lens surface re-polishing technology.Guangxue Xuebao/Acta Optica Sinica,35(8).
MLA	Zhao, Y.,et al."Remove trefoil aberration of project objectiveusing lens surface re-polishing technology".Guangxue Xuebao/Acta Optica Sinica 35.8(2015).

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利用面形精修技术去除投影物镜中的三叶像差（3398KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载