Measurement of 2 m SiC asphere mirror based on swing arm profilometer

	Measurement of 2 m SiC asphere mirror based on swing arm profilometer
	Xiong, L.; X. Luo; Z. Liu; L. Zheng; F. Zhang and X. Zhang
	2015
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	35 期号:12
摘要	For the measurement of large SiC mirror before interferometry test, the method of swing arm profilometry (SAP) is introduced. The basic principle and flow chart of SAP are presented; with surface reconstructed based on consistency of surface height at scan crossings and defocusing amount of mirror surface measured with a laser tracker as supplementary, an optimized test model is built. As an example, a 2040 mm SiC mirror is tested by SAP, with accuracy of 0.46 m root mean square (RMS), which is 0.04 m deviation from interferometric test. As a best-fitting sphere being basement of the test, in situ metrology is implemented; this method provides an accurate and efficient way to measure a large mirror, and meet the need of high-accuracy measurement of large SiC mirrors during grinding. 2015, Chinese Laser Prees. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56206
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xiong, L.,X. Luo,Z. Liu,et al. Measurement of 2 m SiC asphere mirror based on swing arm profilometer[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(12).
APA	Xiong, L.,X. Luo,Z. Liu,L. Zheng,&F. Zhang and X. Zhang.(2015).Measurement of 2 m SiC asphere mirror based on swing arm profilometer.Guangxue Xuebao/Acta Optica Sinica,35(12).
MLA	Xiong, L.,et al."Measurement of 2 m SiC asphere mirror based on swing arm profilometer".Guangxue Xuebao/Acta Optica Sinica 35.12(2015).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
2m量级SiC非球面反射镜的摆臂轮廓检测（1505KB）	期刊论文	作者接受稿	开放获取	CC BY-NC-SA	浏览下载