Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Ultra-gradient mirror figuring by 5-axis ion beam | |
| Ma, Z.; Y. Gu; L. Peng and G. Wang | |
| 2015 | |
| 发表期刊 | Guangxue Xuebao/Acta Optica Sinica
 |
| 卷号 | 35期号:6 |
| 摘要 | In order to verify the machining capability of ultra-gradient mirror figuring by ion beam, the figuring of ultra-gradient mirror by 5-axis ion beam is investigated. First, based on the existence measure condition, the experiment scheme is presented and the surface figure date is processed. The dwell time of the area exceed the machine range is compensated. Then the post processing for 5-axis ion beam figuring machine is established, the numerical control generate software is programed based on the post processing, and the correctness of the numerical control program is verified through experiment. Finally, the off-axis figuring experiment of ultra-gradient mirror by 5-axis ion beam is carried out, and through five iterations, the surface figure is improved from initial condition: the peak valley (PV) value is 57.983 nm, the root mean square (RMS) value is 9.406 nm to final condition: PV value is 11.616 nm, RMS value is 1.306 nm. Convergence ratio reaches 7.20. The results indicate that ultra-gradient sphere mirror can be figured by 5-axis ion beam figuring machine to achieve high efficiency and precision, and the figuring of off-axis mirror by ion beam figuring is verified at the same time. , 2015, Chinese Optical Society. All right reserved. |
| 文章类型 | 期刊论文 |
| 收录类别 | EI |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/56181 |
| 专题 | 中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Ma, Z.,Y. Gu,L. Peng and G. Wang. Ultra-gradient mirror figuring by 5-axis ion beam[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(6). |
| APA | Ma, Z.,Y. Gu,&L. Peng and G. Wang.(2015).Ultra-gradient mirror figuring by 5-axis ion beam.Guangxue Xuebao/Acta Optica Sinica,35(6). |
| MLA | Ma, Z.,et al."Ultra-gradient mirror figuring by 5-axis ion beam".Guangxue Xuebao/Acta Optica Sinica 35.6(2015). |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| 应用五轴离子束修正超高陡度镜面.caj（1583KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | 浏览 请求全文 | |
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