Displacement measuring method based on astigmatism effect of crossed cylindrical lenses

	Displacement measuring method based on astigmatism effect of crossed cylindrical lenses
	Han, Q.; J. Wang; C. Li; Y. Liu and Q. Sun
	2015
发表期刊	Guangxue Xuebao/Acta Optica Sinica
卷号	35 期号:7
摘要	Higher precision, non-destructive and handy are necessary to the displacement measurement. Astigmatism effect in orthogonal cylindrical lenses is utilized to measure object displacement. In paraxial approximation, matrix methods for Gaussian ray model are used to trace analysis. In addition, Zemax is adopted to simulate the behavior of the model. Then, the displacement measuring system is set up. At the same time, measuring range and resolution of the system are discussed briefly. The result of the experiment indicates an applicable measuring range of 5.6 m with a highly accuracy of 200 nm for displacement measurement. The technique provides a new noncontract, highly accuracy method for displacement measurement. , 2015, Chinese Optical Society. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56163
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Han, Q.,J. Wang,C. Li,et al. Displacement measuring method based on astigmatism effect of crossed cylindrical lenses[J]. Guangxue Xuebao/Acta Optica Sinica,2015,35(7).
APA	Han, Q.,J. Wang,C. Li,&Y. Liu and Q. Sun.(2015).Displacement measuring method based on astigmatism effect of crossed cylindrical lenses.Guangxue Xuebao/Acta Optica Sinica,35(7).
MLA	Han, Q.,et al."Displacement measuring method based on astigmatism effect of crossed cylindrical lenses".Guangxue Xuebao/Acta Optica Sinica 35.7(2015).

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