Mechanical error compensation algorithm for subaperture stitching interferometry

	Mechanical error compensation algorithm for subaperture stitching interferometry
	Zhang, M.; Y.-X. Sui and H.-J. Yang
	2015
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	23 期号:4 页码:934-940
摘要	An error compensation algorithm was proposed by introducing a position correction compensator into general stitching algorithm to reduce the relative location errors between subapertures due to poor positioning accuracy in a subaperture stitching interferometry. The working principle of the algorithm was introduced and the accuracy of the fitted translation and rotation coefficients was analyzed in theory. Then a simulation experiment by using MetroPro software and Matlab software was implemented, and the influence of positioning accuracy on the stitching results was analyzed. The simulation result shows that the accuracy of rotation coefficient is less than that of the translation coefficient and is consistent with the theoretical analysis. Moreover, the algorithm is more robust than the general stitching algorithms. For the purpose of experimental verifying mechanical error compensation algorithm, a 150 mm flat mirror was tested by a subaperture stitching interferometer and a full aperture interferometer. The test results indicate that the peak-to-valley(PV) and root-mean-square(RMS) of the phase distribution residue are 0.015 30 and 0.001 570, respectively as compared with the stitching results from the directly measured full aperture, which means that the optimal algorithm is stable and reliable and effectively compensates positioning system errors. , 2015, Chinese Academy of Sciences. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56140
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang, M.,Y.-X. Sui and H.-J. Yang. Mechanical error compensation algorithm for subaperture stitching interferometry[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2015,23(4):934-940.
APA	Zhang, M.,&Y.-X. Sui and H.-J. Yang.(2015).Mechanical error compensation algorithm for subaperture stitching interferometry.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,23(4),934-940.
MLA	Zhang, M.,et al."Mechanical error compensation algorithm for subaperture stitching interferometry".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 23.4(2015):934-940.

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